Microstructure and mechanical properties of Ti–Si–N coatings
| Autor: | Wen Jin Meng, R.C. Tittsworth, Peter M. Baldo, L. E. Rehn, Xiaoman Zhang, B. Shi |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Materials science
Nanocomposite Mechanical Engineering Metallurgy chemistry.chemical_element Chemical vapor deposition Nitride Nanoindentation Condensed Matter Physics Microstructure Rutherford backscattering spectrometry chemistry Mechanics of Materials visual_art visual_art.visual_art_medium General Materials Science Ceramic Composite material Tin |
| Zdroj: | Journal of Materials Research. 17:2628-2632 |
| ISSN: | 2044-5326 0884-2914 |
| Popis: | A series of Ti–Si–N coatings with 0 < Si < 20 at.% were synthesized by inductively coupled plasma assisted vapor deposition. Coating composition, structure, atomic short-range order, and mechanical response were characterized by Rutherford backscattering spectrometry, transmission electron microscopy, x-ray absorption near-edge structure spectroscopy, and instrumented nanoindentation. These experiments show that the present series of Ti–Si–N coatings consists of a mixture of nanocrystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N); i.e., they are TiN/a-Si:N ceramic/ceramic nanocomposites. The hardness of the present series of coatings was found to be less than 32 GPa and to vary smoothly with the Si composition. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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