Study on Fabrication of X-ray Collimators by X-ray Lithography Using Synchrotron Radiation

Autor:	Noriyuki Narukage, Yuichi Utsumi, Akinobu Yamaguchi, Shunya Saegusa
Rok vydání:	2021
Předmět:	Materials science Fabrication Optics Polymers and Plastics business.industry Organic Chemistry Materials Chemistry X-ray Synchrotron radiation X-ray lithography business
Zdroj:	Journal of Photopolymer Science and Technology. 34:213-218
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.34.213
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::43666d85dfbb98899b5d60a93040be3a https://doi.org/10.2494/photopolymer.34.213 Zobrazit plný text záznamu