Doping-spike PtSi Schottky infrared detectors with extended cutoff wavelengths

Autor: E. W. Jones, True-Lon Lin, Jin S. Park, Sarath D. Gunapala, H. M. Del Castillo
Rok vydání: 1995
Předmět:
Zdroj: IEEE Transactions on Electron Devices. 42:1216-1220
ISSN: 0018-9383
DOI: 10.1109/16.391201
Popis: A technique incorporating a p/sup +/ doping spike at the silicide/Si interface to reduce the effective Schottky barrier of the silicide infrared detectors and thus extend the cutoff wavelength has been developed. In contrast to previous approaches which relied on the tunneling effect, this approach utilizes a thinner doping spike ( >
Databáze: OpenAIRE