Studies of the Initial Stages of Silicon Carbide Growth using Molecular Hydrocarbon and Methyl Radical Gas Species

Autor:	V.L. Tolani, C. D. Stinespring, J.S. Lannon, J.S. Gold, K.S. Ziemer
Rok vydání:	2000
Předmět:	chemistry.chemical_classification chemistry.chemical_compound Materials science Hydrocarbon chemistry Mechanics of Materials Mechanical Engineering Silicon carbide Methyl radical General Materials Science Surface reaction Condensed Matter Physics Photochemistry
Zdroj:	Materials Science Forum. :293-296
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.338-342.293
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::434d195c358258b909a6c46ee1214e61 https://doi.org/10.4028/www.scientific.net/msf.338-342.293 Zobrazit plný text záznamu