Top-down integration of suspended N+/P/N+ silicon-nanowire-based ion-sensitive field effect transistors for pH analysis at the submicronic scale

Autor:	A. Lale, A. Grappin, A. Lecestre, L. Mazenq, J. Launay, Pierre Temple-Boyer
Rok vydání:	2023
Předmět:	Materials Chemistry Metals and Alloys Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Thin Solid Films. 764:139609
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2022.139609
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::42f93ed99cc6e9c82335ca4ce9cbe620 https://doi.org/10.1016/j.tsf.2022.139609 Zobrazit plný text záznamu Full Text from ScienceDirect