Morphology evolution on diamond surfaces during ion sputtering

Autor:	David P. Adams, Michael J. Vasile, Kim M. Archuleta, Thomas M. Mayer
Rok vydání:	2005
Předmět:	Materials science business.industry Ripple Diamond Surfaces and Interfaces Surface finish engineering.material Condensed Matter Physics Molecular physics Surfaces Coatings and Films Wavelength Optics Amplitude Sputtering engineering Surface roughness business Saturation (magnetic)
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:1579-1587
ISSN:	1520-8559 0734-2101
Popis:	We have conducted an extensive study of the evolution of surface morphology of single crystal diamond surfaces during sputtering by 20keV Ga+ and Ga++H2O. We observe the formation of well-ordered ripples on the surface for angles of incidence between 40 and 70°. We have also measured sputter yields as a function of angle of incidence, and ripple wavelength and amplitude dependence on angle of incidence and ion fluence. Smooth surface morphology is observed for 70°. The formation and evolution of well-ordered surface ripples is well characterized by the model of Bradley and Harper, where sputter-induced roughening is balanced by surface transport smoothing. Smoothing is consistent with an ion-induced viscous relaxation mechanism. Ripple amplitude saturates at high ion fluence, confirming the effect of nonlinear processes. Differences between Ga+ and Ga++H2O in ripple wavelength, amplitude, and time to saturation of amplitude are consis...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::42ec96f1f42347a5ad211f8e9065e129 https://doi.org/10.1116/1.2110386 Zobrazit plný text záznamu