| Autor: |
Tatsuya Fukami, Naoki Yutani, Kazuhiko Tsutsumi, Hiroshi Ohji, M. Taruya, A. Koshimizu |
| Rok vydání: |
2003 |
| Předmět: |
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| Zdroj: |
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE. |
| DOI: |
10.1109/memsys.2003.1189795 |
| Popis: |
This paper presents a newly developed pressure sensor. The principle of its pressure measurement is based on heat transfer from a heat source fabricated on a sensor element to a metal diaphragm, to which pressure is applied. The lower linearity errors less than /spl plusmn/1.0%FS without any compensation and the lower consumption power, 10 mW, are achieved by using a reference heater and an optimization of the sensor element. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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