A Study of the Geometrical Correction Factor on the Sensitivity of the Transversal Piezoresistive Sensors

Autor:	Guilherme de Oliveira Coraucci, Jose Godoy Filho, Rafael V. De Oliveira, Fabiano Fruett
Rok vydání:	2009
Předmět:	Optics Materials science business.industry Transversal (combinatorics) Sensitivity (control systems) business Piezoresistive effect
Zdroj:	ECS Transactions. 23:211-219
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.3183722
Popis:	The sensitivity of four-terminal devices like Hall and piezoresistive sensors is very dependent on its geometric parameters. This dependence is modeled by the Geometrical Correction Factor (G). The majority of these studies take very time-consumption analytical calculations for the analysis of G. In order to simplify this analysis, we present numerical analysis for the most common geometrical forms of four-terminal devices and propose suitable aspect ratios of its geometric parameters for maximization of G. This result is general for any four-terminal-shaped sensors. Experimental result of a new topology of pressure sensor is also presented, which maximizes G in a comparison with conventional four-terminal devices and also improves its sensitivity.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::42b8005e0e2870b90d4423d30266954a https://doi.org/10.1149/1.3183722 Zobrazit plný text záznamu