On the debris phenomenon with laser‐sputtered polymers

Autor:	Bodil Braren, Antonio Miotello, Charles E. Otis, Roger Kelly
Rok vydání:	1992
Předmět:	chemistry.chemical_classification Shock wave Materials science Photon Physics and Astronomy (miscellaneous) Target surface Astrophysics::High Energy Astrophysical Phenomena Gas dynamics Polymer Laser Debris law.invention chemistry Sputtering law Polymer chemistry Atomic physics
Zdroj:	Applied Physics Letters. 60:2980-2982
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.107444
Popis:	The sputtering of polymer films with 248 or 308 nm laser pulses causes two groups of particles to be emitted. Light particles are emitted more rapidly and escape to form a shock wave. Heavy particles are emitted more slowly and under some conditions are impeded by the light ones, expand sideways, and leave debris on the target surface. Debris formation can be understood from ordinary gas dynamics where it is equivalent to recondensation beyond the bombarded spot. This is shown by numerical solution of the flow equations.
Databáze:	OpenAIRE
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