A sandwich piezoelectric actuator with long stroke and nanometer resolution by the hybrid of two actuation modes
| Autor: | Liang Wang, Kai Li, Yingxiang Liu, Jie Deng, Weishan Chen |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Horizontal scan rate Materials science Acoustics Metals and Alloys Thrust 02 engineering and technology Bending 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Displacement (vector) Computer Science::Other Surfaces Coatings and Films Electronic Optical and Magnetic Materials 0103 physical sciences Direct mode Stroke (engine) Electrical and Electronic Engineering 0210 nano-technology Actuator Instrumentation Voltage |
| Zdroj: | Sensors and Actuators A: Physical. 296:121-131 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2019.07.013 |
| Popis: | A piezoelectric actuator operating at direct actuation mode and inertial actuation mode was proposed for linear driving with long stroke, nanometer resolution and high scan rate. Different from the previous piezoelectric actuators constructed with stacked flexure structures, the proposed actuator used a sandwich structure with high resonance frequency. The operating principle was discussed. The structure was designed by the assistance of theoretical analysis and finite element simulation. A prototype was fabricated and its experiments were performed to investigate the characteristics. The resonance frequency of the first horizontal bending mode was measured to be 12,720 Hz by a scanning laser Doppler vibrometer. When operating at the direct mode, a displacement resolution of 12.5 nm was obtained and a maximum scan rate that was about 190 Hz with scan range of 3.685 μm was achieved. When operating at the inertial mode, the prototype achieved the maximum output speed and thrust force of 14.44 μm/s and 1.67 N under the voltage of 420 Vp-p and frequency of 15 Hz, respectively. The proposed actuator can achieve a long stroke by the inertial actuation mode and realize high frequency scanning of micron stroke with nanometer resolution by the direct actuation mode, it has good application prospects in the fields of nano scanning and biological manipulation. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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