Transparent thin film bulk acoustic wave resonators
| Autor: | M. DeMiguel-Ramos, Marta Clement, Teona Mirea, Jimena Olivares, Andrew J. Flewitt, B. Díaz-Durán, Girish Rughoobur, Enrique Iborra |
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| Rok vydání: | 2016 |
| Předmět: |
Electromechanical coupling coefficient
Materials science business.industry Reflector (antenna) 02 engineering and technology Transparency (human–computer interaction) 021001 nanoscience & nanotechnology 01 natural sciences Resonator 0103 physical sciences Electrode Transmittance Optoelectronics Thin film 0210 nano-technology business 010301 acoustics Visible spectrum |
| Zdroj: | 2016 European Frequency and Time Forum (EFTF). |
| DOI: | 10.1109/eftf.2016.7477830 |
| Popis: | Transparent electronic devices have interesting applications in a wide range of fields, such as wearables, intelligent windows, new concepts of smartphones and sensors. In this work we present fully transparent AlN-based thin film bulk acoustic wave solidly mounted resonators. We have used indium-tin oxide as the transparent material for the electrodes and a transparent acoustic reflector consisting of alternating layers of SiO2 and Ta2O5 or WO3, to ensure an adequate acoustic confinement while keeping a high transparency. The fabricated devices display an electromechanical coupling coefficient up to 4% and a quality factor Q of 100. The measured transmittance in the visible spectrum (450 – 750 nm) is 75%. |
| Databáze: | OpenAIRE |
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