Aging effects in test silicon wafers prepared for wafer cleaning process evaluation
| Autor: | Natraj Narayanswami, Greg Thomes, James Weygand, Jeffery Butterbaugh, Seong-Ho Yoo, Benjamin Liu, Dennis Paul, Juergen Scherer, Lawrence Davis, Kenton Childs |
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| Rok vydání: | 2023 |
| Zdroj: | Particles on Surfaces: Detection, Adhesion and Removal, Volume 7 ISBN: 9780429070716 |
| DOI: | 10.1201/9780429070716-8 |
| Databáze: | OpenAIRE |
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