OPC modeling using AFM CD measurement
| Autor: | Kyoil Koo, Gyengseop Kim, Jung-Dal Choi, Seung-Hune Yang, Ho-Kyu Kang, Sang-hun Kim, Sooryong Lee, Young-Chang Kim |
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| Rok vydání: | 2013 |
| Předmět: | |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| Popis: | Most important factors in OPC model building will be sampling data for model calibration. We will demonstrate that how CD-AFM data can be used in OPC modeling and will show possibility to get a more predictive model by using CD-AFM data. |
| Databáze: | OpenAIRE |
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