Thin Metal Films and Multi-Layers Structure as Absorbers for Infrared Detectors
| Autor: | Chang Long Cai, Shun Zhou, Liang Song, Huan Liu |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Materials science
business.industry Infrared Mechanical Engineering Detector Polishing Reflector (antenna) Condensed Matter Physics Evaporation (deposition) Metal Optics Mechanics of Materials visual_art visual_art.visual_art_medium General Materials Science Composite material business Layer (electronics) Polyimide |
| Zdroj: | Materials Science Forum. :352-355 |
| ISSN: | 1662-9752 |
| Popis: | As thin metal films are known to act as wide-band absorbers for infrared radiation, in this paper Ni metal films are prepared on the Ge surface of double-sided polishing, The results showed the absorbing properties of the metal layer are strongly influenced by the dielectric function of the sensor material. This paper also describes one multi-layers structure as absorber. The structure included a reflector layer of 100-nm-thick Ti (e-beam evaporation), 2-µm-thick polyimide(spin-coating), and 14.9-nm-thick Ni film (e-beam evaporation). These contain a half transmissive thin metal film, a total reflective thin metal film and a quarter-wave polyimide film. The results showed that, measured performance matches well with theoretical predictions. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|