Chemically Amplified Dehydration of Thin Oxide Films
| Autor: | Torgny Gustafsson, Wei Wang, Douglas A. Keszler, Can Xu, Kai Jiang, Jeremy T. Anderson, Eric L. Gafunkel |
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| Rok vydání: | 2015 |
| Předmět: |
Materials science
Renewable Energy Sustainability and the Environment Scattering General Chemical Engineering Diffusion Mineralogy General Chemistry medicine.disease Ion Chemical engineering Transmission electron microscopy Thermal medicine Environmental Chemistry Dehydration Thin oxide Deposition (law) |
| Zdroj: | ACS Sustainable Chemistry & Engineering. 3:1081-1085 |
| ISSN: | 2168-0485 |
| DOI: | 10.1021/sc500824a |
| Popis: | The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance−voltage measurements reveal the presence of mobile protons associated with trapped −OH and H2O in the films. Deposition of a thin solution- processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures. |
| Databáze: | OpenAIRE |
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