Structural properties of barium strontium titanate films grown under different technological conditions

Autor:	M. M. Gaidukov, V. I. Al’myashev, A. G. Altynnikov, Alexander Gagarin, Andrey Tumarkin, A. B. Kozyrev, S. V. Razumov
Rok vydání:	2015
Předmět:	Strontium Materials science chemistry.chemical_element Barium Condensed Matter Physics Ferroelectricity Electronic Optical and Magnetic Materials chemistry Chemical engineering Impurity Sputtering Phase (matter) Deposition (phase transition) Crystallite
Zdroj:	Physics of the Solid State. 57:553-557
ISSN:	1090-6460 1063-7834
DOI:	10.1134/s1063783415030348
Popis:	The structural properties of ferroelectric barium strontium titanate films with different compositions prepared under different deposition conditions have been investigated. It has been shown that the deposition temperature directly affects the phase and component compositions of the films, crystal lattice parameters, and crystallite sizes. At a deposition temperature of approximately 600°C, impurity phases of strontium polytitanates are formed in addition to the barium strontium titanate phase. An increase in the deposition temperature to 880°C leads to a barium deficiency as compared to the sputtering target. The deposition temperature providing a stoichiometric transfer of the component composition of the target into the barium strontium titanate film has been estimated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::420b024bfe9ef45b0c38f603b7227924 https://doi.org/10.1134/s1063783415030348 Zobrazit plný text záznamu Full text from SpringerLink