Development of low energy neutral atom scattering spectroscopy based on CAICISS operable in gas phase atmosphere

Autor:	Yusuke Michishita, Kenjiro Oura, Shunjiro Fujii, Mitsuhiro Katayama, Nobuhiko Miyamae
Rok vydání:	2005
Předmět:	Nuclear and High Energy Physics Energetic neutral atom Chemistry Scattering Energy conversion efficiency Analytical chemistry Insulator (electricity) Atomic physics Coaxial Spectroscopy Instrumentation Gas phase Ion
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 232:290-294
ISSN:	0168-583X
Popis:	Based on coaxial impact-collision ion scattering spectroscopy (CAICISS) operable in a gas phase atmosphere, we have developed a low energy neutral atom scattering spectroscopy, in which a neutral He beam is used as a probe, to avoid the charging effects of insulator surfaces. In this technique, He gas is introduced into a charge exchange cell set in a sample chamber, and under He gas atmosphere He+ ions are neutralized just before impinging on the sample. The conversion efficiency of He+ to He0 was estimated to be about 40%. In order to demonstrate the performance of the technique, we successfully characterized MgO film deposited on fused silica, without the charging effects of insulator surfaces.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::41f90cc2779d2484bbe1c53df74100b0 https://doi.org/10.1016/j.nimb.2005.03.060 Zobrazit plný text záznamu Full Text from ScienceDirect