Refrigerator cryopump with a simple oil-free roughing pump

Autor:	H.-U. Häfner, M. Mattern-Klosson, H. H. Klein, S. Schreck, H.-J. Mundinger, U. Timm
Rok vydání:	1995
Předmět:	Materials science Roughing pump Ultra-high vacuum Refrigerator car Mechanical engineering Thermodynamics Diaphragm pump Cryopump Condensed Matter Physics Instrumentation Oil free Surfaces Coatings and Films
Zdroj:	Vacuum. 46:879-881
ISSN:	0042-207X
DOI:	10.1016/0042-207x(95)00062-3
Popis:	For the operation of a refrigerator cryopump a roughing pump is necessary to provide a sufficient low starting pressure prior to cool-down. Usually oil lubricated rotary vane pumps are used for that purpose. However, the demand for a fully hydrocarbon-free high vacuum system does not allow that type of roughing pump. Therefore we performed investigations with a dry oil-free diaphragm pump as a roughing pump for a refrigerator cryopump. We were able to show that in spite of the high ultimate pressure a diaphragm pump can be used. The combination of a cryopump with a diaphragm pump meets the requirement of a hydrocarbon-free high vacuum system.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::41c4ddb84e4facc24a474deea0bdcc8e https://doi.org/10.1016/0042-207x(95)00062-3 Zobrazit plný text záznamu Full Text from ScienceDirect