Structural and Electrical Characterization of Isotactic PMMA Thin Films Deposited by Spin Coating

Autor:	C. H. Ortiz-Estrada, M.A. Ocampo, K. Sánchez Catalán, Israel Mejia, F. Rodríguez Melgarejo, Salomón R. Vásquez García, B. Garcia-Gaitan, N. Flores Ramírez, B. García, R. García, R. Zavala, C. H. Or. Fernández Loyola, Gabriel Luna-Bárcenas
Rok vydání:	2009
Předmět:	Permittivity Spin coating Materials science Polymers and Plastics Capacitive sensing Organic Chemistry Gate dielectric Dielectric Condensed Matter Physics Materials Chemistry Breakdown voltage Composite material Thin film Current density
Zdroj:	Macromolecular Symposia. :342-347
ISSN:	1521-3900 1022-1360
DOI:	10.1002/masy.200950940
Popis:	Thin PMMA films have been studied extensively for their potential applications as membranes, microlithography and optical applications. PMMA has been recently use like gate dielectric film in OTFT. In this paper we present the structural and electrical characteristics of isotactic PMMA (i-PMMA) thin films prepared by spin coating depositions. The electrical characterization was done using a simple capacitive structure to observe current density across dielectric film and voltage breakdown. The i-PMMA films possess low current density across dielectric (1 x 10 -8 A/cm 2 ) and the breakdown voltage is higher than 100 V.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::41b5e5a681df6337d3e00695737b98f9 https://doi.org/10.1002/masy.200950940 Zobrazit plný text záznamu Plný text