Optical properties of La1−xSrxVO3 (0 ≤ x ≤ 1) films grown on LSAT substrates using radio frequency sputtering deposition

Autor:	Ye Jin Oh, Jong-Soo Rhyee, Hosun Lee, Thi Thu Nguyen, Dae Ho Jung, Jae Jun Lee
Rok vydání:	2022
Předmět:	Diffraction Materials science Analytical chemistry Surfaces and Interfaces Dielectric Sputter deposition Condensed Matter Physics Radio frequency sputtering Surfaces Coatings and Films Crystallinity chemistry.chemical_compound chemistry Spectroscopic ellipsometry LSAT Deposition (law)
Zdroj:	Journal of Vacuum Science & Technology A. 40:013401
ISSN:	1520-8559 0734-2101
DOI:	10.1116/6.0001438
Popis:	La1−xSrxVO3 (0 ≤ x ≤ 1) films can be transparent conducting oxides such as n-type SrVO3 and p-type La2/3Sr1/3VO3 films. They also show a semiconductor-to-metal transition (SMT) near x = 0.2. The optical and electrical properties of La1−xSrxVO3 (0 ≤ x ≤ 1) films grown on (LaAlO3)0.3(Sr2AlTaO6)0.7 (LSAT) substrates using RF sputtering deposition were investigated. Resistivities of La1−xSrxVO3 showed SMT near x = 0.2. La1−xSrxVO3 films grown on LSAT substrates were found to have high crystallinity using θ−2θ scan and grazing incidence x-ray diffraction measurements. Dielectric functions of La1−xSrxVO3 films were measured using spectroscopic ellipsometry. The evolution of optical spectra of La1−xSrxVO3 films from LaVO3 to SrVO3 was compared to the electronic band structures as a function of Sr composition, which was either experimentally observed or theoretically calculated in the literature. With increasing Sr composition, the interband transition energies of O 2p to V 3d states near 4 eV changed linearly as a function of Sr content.
Databáze:	OpenAIRE
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