Thermal characterisation of a direction dependent flow sensor
| Autor: | Attila Aszódi, Péter Fürjes, István Bársony, Cs. Dücső, G. Légrádi |
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| Rok vydání: | 2004 |
| Předmět: |
Finite volume method
Materials science Metals and Alloys Laminar flow Mechanics Condensed Matter Physics Computer Science::Other Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Thermal mass flow meter Surface micromachining Flow (mathematics) law Thermal Electronic engineering Equivalent circuit Electrical and Electronic Engineering Resistor Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 115:417-423 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2004.04.050 |
| Popis: | A calorimetric sensor for detection of gas velocity and flow direction was constructed by sacrificial porous silicon micromachining technique. The sensing element contains four temperature sensing resistors arranged symmetrically around a central filament heater. Finite volume flow simulations (FVM) for velocity vector and temperature distribution around the system elements led to the conclusion that the laminar flow conditions, essential for accurate calorimetric sensing, can be maintained by adequate selection of device dimensions and channel depth. Predictions by the flow and thermal simulations were aimed at defining the optimum geometric design. The results of functional tests performed on the fabricated structure were interpreted in terms of changes of parameters in the thermal equivalent circuit of the device. |
| Databáze: | OpenAIRE |
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