Chromium oxide – A novel sacrificial layer material for MEMS/NEMS and micro/nanofluidic device fabrication

Autor:	Alokik Kanwal, B. Robert Ilic, Christopher H. Ray, Kerry Siebein, J. Alexander Liddle
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Micro and Nano Engineering. 16:100145
ISSN:	2590-0072
DOI:	10.1016/j.mne.2022.100145
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4178bb3b5c7f13fbbd143a078ada19a9 https://doi.org/10.1016/j.mne.2022.100145 Zobrazit plný text záznamu