Measurement of aspects of surface form using an optical differential height measurement technique

Autor:	James S. Barton, Steve Kidd, Duncan Paul Hand, Julian D. C. Jones, Tom Carolan
Rok vydání:	1996
Předmět:	Surface (mathematics) Signal processing Materials science Optical fiber business.industry Applied Mathematics Detector chemistry.chemical_element Michelson interferometer Laser law.invention Interferometry Optics chemistry Aluminium law business Instrumentation Engineering (miscellaneous)
Zdroj:	Measurement Science and Technology. 7:1579-1582
ISSN:	1361-6501 0957-0233
Popis:	We describe a fibre interferometer for making non-contact differential height measurements of machined metal surfaces without removal from the machine tool. The system comprises a probe which produces two small laser spots ( diameter, 3 mm apart) on the surface, an optical fibre addressing lead and signal processing unit incorporating an optical source and detector. The probe is an extrinsic fibre optic Michelson interferometer whose arms terminate in the laser spots on the test surface, and the signal processing unit calculates the difference in local surface height between the two spots. Differential height profiles of machined aluminium surfaces and optical mirror surfaces are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::416ee494857cde7fcead2de4b5026a65 https://doi.org/10.1088/0957-0233/7/11/006 Zobrazit plný text záznamu