GaSb nanocrystals grown by solid phase epitaxy and embedded into monocrystalline silicon

Autor: E.A. Chusovitin, N. G. Galkin, S.A. Dotsenko, Alexander V. Shevlyagin, Anton K. Gutakovskii, D. L. Goroshko, S. V. Chusovitina
Rok vydání: 2017
Předmět:
Zdroj: Scripta Materialia. 136:83-86
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2017.04.004
Popis: A double-layer heterostructure with embedded into single-crystal silicon matrix nanocrystals (NCs) of gallium antimonide (GaSb) was grown. The NCs were formed by solid phase epitaxy method using 1.6-nm-thick Ga-Sb stoichiometric mixture and annealing at a temperature range of 200–500 °C. The embedded NCs have a concentration of about 5.4 × 1010 cm− 2, a mean height of 8.6 nm and a mean lateral dimension of 19.2 nm. A stress induced inside the NCs owing to lattice mismatch between Si and GaSb was fully relaxed by edge dislocations at Si/GaSb interface. All the NCs have identical epitaxial relationship: GaSb(111)||Si(111), GaSb 1 1 − 0 ||Si 1 1 − 0 .
Databáze: OpenAIRE