MNM-3B-7 Fabrication and evaluation of silicon electret condenser microphone

Autor:	Toshifumi Tajima, Masahide Goto, Kei Hagiwara, Yoshinobu Yasuno, Yoshinori Iguchi, Kodama Hidekazu, Kenichi Kidokoro
Rok vydání:	2010
Předmět:	Soft x ray Materials science Fabrication Silicon chemistry Microphone Acoustics chemistry.chemical_element Condenser microphone Electret
Zdroj:	The Proceedings of the Symposium on Micro-Nano Science and Technology. :169-170
ISSN:	2432-9495
DOI:	10.1299/jsmemnm.2010.2.169
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::414899415cc7f905616fa6c35fcedb15 https://doi.org/10.1299/jsmemnm.2010.2.169 Zobrazit plný text záznamu