The investigation of dry plasma technology in each steps for the fabrication of high performance redistribution layer
| Autor: | Daisuke Hironiwa, Haw Wen Chen, Yasuhiro Morikawa, Takashi Kurimoto, Ryuichiro Kamimura |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC). |
| DOI: | 10.1109/ectc51906.2022.00308 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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