| Autor: |
Kazuto Yamauchi, Kazuteru Akiyama, Yuka Nishioka, Junki Sonoyama, Makina Yabashi, Satoshi Matsuyama, Yoshiki Kohmura, Tetsuya Ishikawa, Takato Inoue, Hiroki Nakamori, Lahsen Assoufid, Yasuhisa Sano |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
Advances in X-Ray/EUV Optics and Components XVI. |
| DOI: |
10.1117/12.2594944 |
| Popis: |
We have developed an X-ray zoom condenser optical system using deformable mirrors that can adjust the beam size by deformation of their shape. The shapes of deformable mirrors are changed by a combination of mechanical and piezoelectric bending. Large deformations up to third order polynomials are achieved by mechanical bending. More precise shapes are achieved by piezoelectric bimorph mirror. However, because both ends of the mirror are mechanically clamped, capability of deformation by piezoelectric bending is lower than that of free-standing piezoelectric bimorph mirrors. So, we propose a bending method that tunes the mechanical bending conditions to intentionally leave the optimized shape error to be easily compensated by the piezoelectric bending process. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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