APPLICATION OF THE SPECTRAL INTERFEROMETRY METHOD FOR MICRO-AND NANODISTANCE MEASUREMENT
Autor: | M.B. Danailow, D. N. Tatyanko, Yu. P. Machekhin, Konstantin Lukin |
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Rok vydání: | 2011 |
Předmět: |
White light interferometry
Interferometry Optics Materials science law business.industry Electronic speckle pattern interferometry Michelson interferometer Electrical and Electronic Engineering Angle-resolved low-coherence interferometry Spectral phase interferometry for direct electric-field reconstruction business law.invention |
Zdroj: | Telecommunications and Radio Engineering. 70:1579-1591 |
ISSN: | 0040-2508 |
DOI: | 10.1615/telecomradeng.v70.i17.70 |
Databáze: | OpenAIRE |
Externí odkaz: |