Ion-induced photon emission of magnesium aluminate spinel during 60 keV Cu− implantation

Autor: V. Bandourko, N. Kishimoto, Yoshihiko Takeda, T.T. Lay, Chi-Gyu Lee
Rok vydání: 2001
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :68-73
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00338-x
Popis: The beam–solid interaction during high flux heavy-ion implantation has been studied by the in situ detection of photon emission. A spinel of MgO·n(Al2O3) with n=2.4 was irradiated with 60 keV Cu− at dose rates of 10, 50 or 100 μA/cm2 to a dose of 1.5×10 17 ions/cm 2 . Under the implantation, photon emission ranging from 1.4 to 6.2 eV was detected by a time-resolved optical device based on a fast-response CCD (Princeton Instruments: IMAX-512). Emission lines of sputtered Mg, Al and Cu atoms were observed. A comparison of the dose and dose rate dependence of the Cu I line intensity from MgO·n(Al2O3) with those obtained for amorphous (a-)SiO2 substrate revealed the good correlation of Cu I line intensity with nanoparticle formation detected by optical absorbance measurement.
Databáze: OpenAIRE