Temperature-controlled Kelvin microprobe
| Autor: | Tian-Hong Zhang, Jiří Janata, Danuta Petelenz |
|---|---|
| Rok vydání: | 1993 |
| Předmět: |
Kelvin probe force microscope
Microprobe Materials science business.industry Transistor Metals and Alloys Analytical chemistry chemistry.chemical_element Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention chemistry Gate oxide law Electrode Materials Chemistry Optoelectronics Electrical and Electronic Engineering business Metal gate Platinum Instrumentation Layer (electronics) |
| Zdroj: | Sensors and Actuators B: Chemical. 12:175-180 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/0925-4005(93)80016-5 |
| Popis: | An insulated-gate field-effect transistor with the metal gate suspended 1–2 μm above the solid insulator is a miniature equivalent of a Kelvin probe. The suspended gate is a thin layer of platinum, which is mechanically supported by a layer of polyimide several micrometers thick. In addition to being the gate electrode, the platinum film serves as a resistive thermometer and a heater. By passing a constant current through it, it is possible to heat the bridge up to 400 °C. This heating has only a negligible effect on the transistor characteristics of the structure below it. The new device can be used as a tool to study electrochemically deposited layers and as a chemical microsensor. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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