Structure of Cu–N layers synthesized by pulsed magnetron sputtering with variable frequency of plasma generation
| Autor: | Rafal Chodun, Katarzyna Nowakowska-Langier, Lukasz Skowronski, Roman Minikayev, L. Kurpaska, Krzysztof Zdunek, Sebastian Okrasa, Grzegorz W. Strzelecki |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Nuclear and High Energy Physics Materials science Analytical chemistry chemistry.chemical_element 02 engineering and technology Plasma Nitride Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Copper chemistry Modulation Sputtering 0103 physical sciences High-power impulse magnetron sputtering 0210 nano-technology Instrumentation Frequency modulation |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 409:167-170 |
| ISSN: | 0168-583X |
| DOI: | 10.1016/j.nimb.2017.04.070 |
| Popis: | This work concerns the synthesis of copper nitride Cu3N layers by means of the Pulsed Magnetron Sputtering method (PMS), operating with various conditions of frequency modulation. We have studied how this parameter affect the mechanism of layer growth. Reported studies focus on the structure of the Cu–N layers. The results showed that the synthesis processes strongly depend of sputtering parameters. The modulation of sputtering frequency had an effect on the structure, phase composition and consequently, the properties of synthesized layers. Our results revealed that the studied parameter should be considered as an another important factor for optimization of layers synthesis and opens new paradigm in future implementation of PMS-based methods. |
| Databáze: | OpenAIRE |
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