Study of a New Plasma Source for Free-Standing Plasmas

Autor:	U. Schumacher, Andreas Schulz, Klaus-Martin Baumgärtner, Ulrich Schweitzer, Matthias Walker, Ulrich Stroth
Rok vydání:	2007
Předmět:	Parabolic antenna Polymers and Plastics business.industry Chemistry Plasma Electron Condensed Matter Physics Concentrator symbols.namesake Optics Physics::Plasma Physics symbols Langmuir probe Plasma diagnostics Atomic physics business Microwave Glass tube
Zdroj:	Plasma Processes and Polymers. 4:S978-S981
ISSN:	1612-8869 1612-8850
DOI:	10.1002/ppap.200732311
Popis:	A new type of plasma source to maintain a free-standing, linearly extended plasma was studied. The plasma reactor is a microwave concentrator which is comprised of a cylindrical cavity with an elliptical base and a microwave antenna near one of its focal lines and is operated at f = 2.45 GHz. Numerical simulations and measurements of the microwave pattern inside the assembly were found to be in good agreement with each other. Electron densities and electron temperatures were measured using Langmuir probes. A completely free-standing plasma inside an evacuated glass tube was achieved for certain combinations of gas pressure and injected power.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::40ad6574076c544b8a5f7b0c2c032ac7 https://doi.org/10.1002/ppap.200732311 Zobrazit plný text záznamu Plný text