Nanoimprinting using release-agent-coated resins
| Autor: | Makoto Okada, Ken-ichiro Nakamatsu, Yuichi Haruyama, Masayuki Iwasa, Shinji Matsui, Kazuhiro Kanda |
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| Rok vydání: | 2009 |
| Předmět: |
Materials science
technology industry and agriculture Nanotechnology Adhesion Condensed Matter Physics Atomic and Molecular Physics and Optics Surface energy Surfaces Coatings and Films Electronic Optical and Magnetic Materials Nanoimprint lithography law.invention Scanning probe microscopy Release agent Nanolithography law Monolayer Electrical and Electronic Engineering Composite material Layer (electronics) |
| Zdroj: | Microelectronic Engineering. 86:673-675 |
| ISSN: | 0167-9317 |
| Popis: | A fluorinated self-assembled monolayer (F-SAM) is mainly used as the antisticking layer. To prevent the F-SAM coated on the nanoimprint lithography (NIL) mold from deteriorating, we propose a new form of nanoimprinting using a release-agent-coated resin. The results from measuring the surface free energy and observations by scanning probe microscopy (SPM) confirmed that the surface free energy, frictional force, and adhesion force of the release-agent spray-coated polymethylmethacrylate (PMMA) were lower than those of PMMA. To prove the release-agent spray-coated PMMA had a releasing effect, we tried to undertake thermal nanoimprinting on it using a mold without F-SAM. The pattern was clearly imprinted on the resin without any signs of adhesion. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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