Determination of plasma parameters in rf glow-discharge plasma

Autor:	Sh. Chadraabal, G. Batdemberel, P. Altantsog
Rok vydání:	2009
Předmět:	Nuclear and High Energy Physics Glow discharge Electron density Plasma parameters Chemistry Plasma symbols.namesake Electrode symbols Electron temperature Langmuir probe Plasma diagnostics Atomic physics Instrumentation
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 267:3263-3266
ISSN:	0168-583X
DOI:	10.1016/j.nimb.2009.06.090
Popis:	The Langmuir probe measurements were carried out in a planar rf discharge of N2 and Ar gases. The dc characteristic I–U curves are calculated from the measured rf characteristic I–U curves for frequencies 10–60 MHz. The measured parameters such as electron temperature and electron density are compared with the simulated results. At gas pressures 10–40 Pa, the sheath thickness at the powered electrode was proportional to f−0.5 for simulation and f−2/3 by using the electrical parameters of the probe measurements and to p−0.5 for both cases.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4098fa2dfc8d38b0f8a17fe20fc429a1 https://doi.org/10.1016/j.nimb.2009.06.090 Zobrazit plný text záznamu Full Text from ScienceDirect