Organic-Inorganic Hybrid Nano-laminates Fabricated by Ozone-assisted Molecular-atomic Layer Deposition

Autor:	Jiyoung Kim, Antonio T. Lucero, Mingun Lee, Jie Huang
Rok vydání:	2013
Předmět:	Materials science Process Chemistry and Technology Surfaces and Interfaces General Chemistry Contact angle Atomic layer deposition Chemical engineering Ellipsometry Transmission electron microscopy Molecule Organic chemistry Fourier transform infrared spectroscopy Thin film Layer (electronics)
Zdroj:	Chemical Vapor Deposition. 19:142-148
ISSN:	0948-1907
DOI:	10.1002/cvde.201207041
Popis:	In this study, we investigate 7-octenytrichlorosilane (7-OTS) multilayers and relevant organic-inorganic hybrid nano-laminates fabricated using ozone (O3) based molecular-atomic layer deposition (MALD). Highly concentrated O3 gas introduced into the MALD chamber converts alkene (CC) terminal groups of 7-OTS molecules into carboxylic (COOH) groups. Trimethyl-aluminum (TMA) is applied to form a linker to construct multilayers of the OTS molecules. Aluminum oxide (Al2O3) and zinc oxide (ZnO) are embedded between the organic layers to form an organic-inorganic hybrid nano-laminate structure. Fourier transform infrared spectroscopy (FTIR), water contact angle measurement, ellipsometry, and transmission electron microscopy (TEM) are used to elucidate the growth mechanism.
Databáze:	OpenAIRE
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