Low turn-on voltage field emission triodes with selective growth of carbon nanotubes

Autor: Kuei-Hsien Chen, Wei Kai Hong, Li-Chyong Chen, Huang-Chung Cheng, Chung-Hsiang Lin, Kuo Ji Chen
Rok vydání: 2001
Předmět:
Zdroj: IEEE Electron Device Letters. 22:516-518
ISSN: 1558-0563
0741-3106
DOI: 10.1109/55.962648
Popis: A low turn-on voltage, field emission triode array has been fabricated using the selective deposition of carbon nanotubes (CNTs) in a microwave plasma chemical vapor deposition (MPCVD) system. The field emission triodes exhibited a low turn-on voltage of 13 V and a large emission current of 23 /spl mu/A with the gate voltage at 60 V. Short-term stress reveals a 10% current fluctuation within 1800 sec. The excellent electric properties suggest that the array shows potential for application in field emission displays and vacuum microelectronics.
Databáze: OpenAIRE