Study on the surface flattening of borosilicate glass in chemical mechanical polishing

Autor:	xueliang Lv, Zijin Li, Dongzhan Zhou, Fanfan Shen, Qiwei Xu, Qing Li, Rui Liu, Kaiyu Li, Jingming Zheng, You Zhou, Yang Zhang
Rok vydání:	2022
Zdroj:	2nd International Conference on Mechanical, Electronics, and Electrical and Automation Control (METMS 2022).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ffe631a3483d5b579d4492811188ae3 https://doi.org/10.1117/12.2635202 Zobrazit plný text záznamu