Laser Synthesis of Low-Agglomerated Submicrometer Silicon Nitride Powders from Chlorinated Silanes

Autor:	Joop Schoonman, R.A. Bauer, Brian Scarlett, F. Einar Kruis, J.G.M. Becht
Rok vydání:	1991
Předmět:	Silanes Materials science Silicon Precipitation (chemistry) Sintering Mineralogy chemistry.chemical_element Laser law.invention chemistry.chemical_compound chemistry Silicon nitride Chemical engineering law Materials Chemistry Ceramics and Composites Particle Particle size
Zdroj:	Journal of the American Ceramic Society. 74:2759-2768
ISSN:	1551-2916 0002-7820
DOI:	10.1111/j.1151-2916.1991.tb06840.x
Popis:	The laser chemical vapor precipitation of Si3N4 powder from mixtures of SiH2Cl2 and NH3 has been studied. The reactant gases were mixed at different heights with respect to the laser beam, thus preventing low-temperature reactions and agglomeration of the produced particles. The morphology and the size of the particles formed are dependent on the injection height of NH3 into the silicon reactant gas stream. Particle diameters are typically between 15 and 110 nm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3fec57cfdc7ea71662cfb28171984e7f https://doi.org/10.1111/j.1151-2916.1991.tb06840.x Zobrazit plný text záznamu Plný text