Smart gas dosage by a peristaltic pump for reactive RF sputtering of composition spread combinatorial hafnium-oxy-nitride layers
| Autor: | Gergely Dobrik, Miklós Serényi, György Sáfrán, Noémi Szász, Benjamin Kalas |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Materials science Analytical chemistry Oxide chemistry.chemical_element 02 engineering and technology Partial pressure Nitride 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Oxygen Surfaces Coatings and Films Hafnium chemistry.chemical_compound Optical coating chemistry Ellipsometry Sputtering 0103 physical sciences 0210 nano-technology Instrumentation |
| Zdroj: | Vacuum. 182:109675 |
| ISSN: | 0042-207X |
| Popis: | Thin metal-oxy-nitride layers are widely used for wavelength selective optical coatings. We aimed to prepare composition spread metal-oxy-nitride combinatorial layers by reactive radiofrequency sputtering for a highly efficient characterization of their optical properties in a wide range of O/N ratios. Affinity of metals requires oxygen proportion, in the Ar-O-N plasma, be set orders of magnitude lower compared to nitrogen. The required low partial pressure range of oxygen was covered by a new concept self-regulating gas inlet assembly based on a peristaltic pump delivering gas from a finite volume vial. Accordingly, oxygen partial pressure was gradually decreasing from 8 × 10−5 mbar towards the base pressure of the chamber. It effected a continuous oxygen depletion and a transition of the deposited film from oxide to nitride. The suitability of our combinatorial method was proved by both energy dispersive spectrometry mapping and ellipsometry of the correlated refractive indices along a composition-spread HfON sample. |
| Databáze: | OpenAIRE |
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