Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

Autor:	Soufiene Krimi, Joachim Jonuscheit, Rene Beigang, Jens Klier, Michael Herrmann
Rok vydání:	2013
Předmět:	Optics Materials science business.industry Terahertz radiation Physics::Optics Dielectric business Terahertz time-domain spectroscopy Sample (graphics) Layer (electronics) Layer thickness Reflection geometry Terahertz spectroscopy and technology
Zdroj:	2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz).
Popis:	We present a novel approach to determine the individual layer thickness in a dielectric multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step, the optical parameters of each layer have to be determined. Based on these parameters, we simulate the reflected THz-pulse from the multilayer system and compare it to the measurement. A genetic algorithm is used to determine the best agreement between simulation and measurement by varying the thickness of each layer.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3fb40cce4caabde4e3b09e323d45cd12 https://doi.org/10.1109/irmmw-thz.2013.6665871 Zobrazit plný text záznamu