Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32at.%Mo amorphous-nanocrystalline metallic composites

Autor:	Erik J. Luber, U. Dahmen, C. T. Harrower, David Mitlin, N. Nelson Fitzpatrick, K. Westra, Stephane Evoy, Colin Ophus, Velimir Radmilovic, Zonghoon Lee
Rok vydání:	2008
Předmět:	Nanoelectromechanical systems Nanocomposite Fabrication Materials science Physics and Astronomy (miscellaneous) Alloy engineering Resonance engineering.material Composite material Microstructure Nanocrystalline material Amorphous solid
Zdroj:	Applied Physics Letters. 92:123108
ISSN:	1077-3118 0003-6951
Popis:	This study details the resonance properties of 20nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al–32at.%Mo nanocomposite. The advantage of the Al–32at.%Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8μm long, 20nm thick Al–32at.%Mo device has a spring constant of K≅280μN∕m. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3f7f6d37489cb664fb25d863e0dd1867 https://doi.org/10.1063/1.2841849 Zobrazit plný text záznamu