Temporally resolved selective area growth of InP in the openings off-oriented from [110] direction

Autor: Yan-Ting Sun, D. Soderstrom, E. Rodriguez Messmer, D. Jahan, Sebastian Lourdudoss
Rok vydání: 2001
Předmět:
Zdroj: Journal of Crystal Growth. 225:9-15
ISSN: 0022-0248
DOI: 10.1016/s0022-0248(01)00970-8
Popis: Temporally resolved selective area growth of InP on patterned substrates with openings off-oriented from [110] direction was studied by low pressure hydride vapour phase epitaxy system. Lateral ove ...
Databáze: OpenAIRE