Temporally resolved selective area growth of InP in the openings off-oriented from [110] direction
Autor: | Yan-Ting Sun, D. Soderstrom, E. Rodriguez Messmer, D. Jahan, Sebastian Lourdudoss |
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Rok vydání: | 2001 |
Předmět: | |
Zdroj: | Journal of Crystal Growth. 225:9-15 |
ISSN: | 0022-0248 |
DOI: | 10.1016/s0022-0248(01)00970-8 |
Popis: | Temporally resolved selective area growth of InP on patterned substrates with openings off-oriented from [110] direction was studied by low pressure hydride vapour phase epitaxy system. Lateral ove ... |
Databáze: | OpenAIRE |
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