Research on a Micro Piezoelectric Gyroscope with Concentrated Rocking-Mass

Autor:	Wang Yinghai, Wu Liu, Wenyuan Chen, Weiping Zhang, Tang Jian, Cheng Yuxiang
Rok vydání:	2015
Předmět:	Marketing Microelectromechanical systems Fabrication Materials science business.industry Vibrating structure gyroscope Gyroscope Condensed Matter Physics Piezoelectricity law.invention law visual_art Materials Chemistry Ceramics and Composites visual_art.visual_art_medium Optoelectronics Ceramic Sensitivity (control systems) business Boundary constraints
Zdroj:	International Journal of Applied Ceramic Technology. 12:E208-E214
ISSN:	1546-542X
DOI:	10.1111/ijac.12397
Popis:	This study introduces a Micro Electro Mechanical Systems (MEMS) piezoelectric gyroscope with a concentrated rocking-mass, made from PZT ceramic. The gyroscope operates in the rocking mode with a frequency of 91.3 kHz. This gyroscope follows the study of the MEMS piezoelectric BAW gyroscope with an improvement of fewer boundary constraints, which enhances the device's operability and characteristic. Through the MEMS fabrication process, the device with a side of length 12 mm achieves a rate sensitivity of 30.7 μV/°/s and a bias stability of 8.6°/s. This study describes the design, fabrication, circuit system, and characteristics of this micro piezoelectric gyroscope.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3f4aeb48e66a95c07eb18f7a7068365d https://doi.org/10.1111/ijac.12397 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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