Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium oxide particles
| Autor: | Chris Van Haag, Peter Heszler, Gunnar A. Niklasson, Claes-Goeran Granqvist, J. Ederth, Detlef Burgard, M. J. Jongerius, A. Hultåker, Arie van Doorn |
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| Rok vydání: | 2002 |
| Předmět: |
Spin coating
Materials science Annealing (metallurgy) business.industry Oxide Analytical chemistry chemistry.chemical_element Condensed Matter Physics Atomic and Molecular Physics and Optics chemistry.chemical_compound Optics chemistry Mechanics of Materials Electrical resistivity and conductivity Signal Processing Transmittance General Materials Science Electrical and Electronic Engineering Thin film business Tin Indium Civil and Structural Engineering |
| Zdroj: | Smart Materials and Structures. 11:675-678 |
| ISSN: | 0964-1726 |
| DOI: | 10.1088/0964-1726/11/5/308 |
| Popis: | Thin films were made by spinning a dispersion of tin-doped indium oxide particles, having an average diameter of 14 nm, onto glass substrates. As-deposited thin films displayed a resistivity ρ of 0.3 Ω m and some optical absorption. Annealing in vacuum at 200–400oC for 2 h, and subsequently in air at 500oC for 2 h, produced films with ρ ≈ 10−3 Ω m and a visible transmittance exceeding 90%. Leaving out the vacuum treatment yielded higher resistivity. |
| Databáze: | OpenAIRE |
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