Enhancement Performance of Co-sputtered Ti-IGZO Thin-Film Transistors with Al-ZrO2 Gate Dielectric
| Autor: | Bing Cheng You, Rong-Ming Ko, Hsiang Yi Chen, Cheng-Xiou Lin, Sheng Tsang Hsiao, Yi Sheng Wang, Shui-Jinn Wang, Chun Kai Liao |
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| Rok vydání: | 2018 |
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| Zdroj: | Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.2018.n-7-01 |
| Databáze: | OpenAIRE |
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