| Popis: |
We have been studying on the cochlear mechanism as an efficient structure for sensors and actuators [3], [4], [5], The "Fishbone" has a silicon micromachinable shape derived from the electro-mechanical analogy of the Zwislocki's transmission line modelfl], [2], We propose here a novel transduction method being suitable for single- chip and wireless acoustic/vibrometric sensor. It has digitally adjustable complex frequency characteristics, radio- frequency (RF) outputs with direct modulation on resonant beams, and Hilbert transform capability to produce real and imaginary signal pair after quadrature-demodulating the RF output. We show theoretical analysis and experimental results using a newly fabricated Fishbone chip. |
