Orthogonally superimposed laser-induced periodic surface structures (LIPSS) upon nanosecond laser pulse irradiation of SiO 2 /Si layered systems
| Autor: | Erik Pfeifer, Fang Yang, Hendrik Reinhardt, Hee-Cheol Kim, Norbert Hampp, Philipp Nürnberger, Moritz Kroll, Sandra Müller |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Silicon General Physics and Astronomy chemistry.chemical_element 02 engineering and technology 01 natural sciences Fluence law.invention Optics law 0103 physical sciences Penetration depth 010302 applied physics business.industry Surfaces and Interfaces General Chemistry Nanosecond 021001 nanoscience & nanotechnology Condensed Matter Physics Laser Surface plasmon polariton Surfaces Coatings and Films Wavelength Full width at half maximum chemistry 0210 nano-technology business |
| Zdroj: | Applied Surface Science. 425:682-688 |
| ISSN: | 0169-4332 |
| Popis: | In this study we examined the formation of laser-induced periodic surface structures (LIPSS) on silicon (Si) in dependence on the thickness of silicon-dioxide (SiO 2 ) on top. LIPSS were generated in air by linearly polarized ≈8 nanosecond laser pulses with a fluence per pulse of 2.41 J cm −2 at a repetition rate of 100 kHz. For SiO 2 layers 2 layers >120 nm parallel oriented LIPSS were observed. In both cases the periodicity was about 80–90% of the applied laser wavelength ( λ 0 = 532 nm). By variation of the SiO 2 layer thickness in the range between 80 nm–120 nm, the dominating orientation changes. Even orthogonally superimposed LIPSS with a periodicity of only 60% of the laser wavelength were found. We show that the transition of the orientation direction of LIPSS is related to the penetration depth of surface plasmon polariton (SPP) fields into the oxide layer. |
| Databáze: | OpenAIRE |
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