A robust resonant controller design for MEMS-based multi-layered prestressed piezoelectric cantilever beam

Autor:	Muhammad Haq Nawaz, Aron Michael, Hemanshu Roy Pota, Ssu-Han Chen, Syed Mamun R Rasid
Rok vydání:	2022
Předmět:	Metals and Alloys Electrical and Electronic Engineering Condensed Matter Physics Instrumentation Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Sensors and Actuators A: Physical. 341:113556
ISSN:	0924-4247
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ecfb0969a3194c5b00a4741b66cd809 https://doi.org/10.1016/j.sna.2022.113556 Zobrazit plný text záznamu Full Text from ScienceDirect