To: Materials Science in Semiconductor Processing
Autor: | Leonid A. Aslanov, Vladimir B. Zaytsev, Valery N. Zakharov, Igor N. Kudryavtsev, Vladimir M. Senyavin, P. B. Lagov, Elena P. Romanteeva, Yuri Pavlov, Timur V. Kylevoy, Valery S. Stolbunov |
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Rok vydání: | 2023 |
Databáze: | OpenAIRE |
Externí odkaz: |