| Autor: |
Osami Sasaki, Samuel Choi, Songjie Luo, Takamasa Suzuki, Jixiong Pu, Kaining Zhang |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
Optical Metrology and Inspection for Industrial Applications VIII. |
| Popis: |
A high resolution spectrum analyzer is required to measure a large thickness of a glass plate with a spectral resolved interferometer. In order to solve this requirement, two positions of a reference surface are used to produce short optical differences in the interference signals. Moreover, in order to reduce the dispersion effect a compensation glass is used for the measurement of the rear surface of a glass plate. Linear and nonlinear components of spectral phase distribution of the interference signal are utilized to obtain position of a reflecting surface and thickness of a dispersive medium, respectively. Experimental results show that the measurement error is less than 800 nm and 2 μm for 1 mm and 5mm-thickness glass plates, respectively. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
